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Microelectromechanical Systems Podcast
 
Author: Albert Pisano
Publisher: webcast.berkeley

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Microelectromechanical Systems Podcast

Microelectromechanical Systems Podcast

webcast.berkeley Course - EE 246

by Albert Pisano




This course is aimed to provide basic understanding of integrated circuit (IC) processes and microelectromechanical system (MEMS). Technologies including analyses, design, and manufacturing processes of MEMS will be introduced. The first part of the course emphasizes IC processes including thin film deposition, lithography, and etching. The second part of the course deals with micromachining processes including surface-, bulk-micromachining, LIGA and other processes.

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http://webcast.berkeley.edu/course_details.php?seriesid=1906978528

MEMS Overview: Unique Characteristics of MEMS, Typical Application Areas of MEMS

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Jan 23, 2008




Download File - 12.4 MB
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MEMS Overview: Examples of MEMS, Future Directions of MEMS

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Jan 25, 2008




Download File - 11.8 MB
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MEMS Solutions for Data Storage: Technical Rationale, HexSil Linear Actuator

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Jan 28, 2008




Download File - 11.3 MB
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MEMS Solutions for Data Storage: V-HARM, Fabrication Issues, Other Technologies (First 10 ...

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Jan 30, 2008




Download File - 8.6 MB
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MEMS Fexures: Overview, Technical Rationale, Examples

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Feb 01, 2008




Download File - 11.1 MB
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MEMS Flexures: Optimal Design, Basic Flexure Types, Hammock, Crab-leg and Double Folded

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Feb 04, 2008




Download File - 11.7 MB
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MEMS Flexures: Stress Analysis, Flexible Design Method, Unified Beam Bending Theory

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Feb 06, 2008




Download File - 10.7 MB
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MEMS Accelerometer: Dynamic Principles, Design, Analysis, Survey of Accelerometers

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Feb 11, 2008




Download File - 10.8 MB
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MEMS Flexures: Meandering Flexures, Solving Procedures

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Feb 13, 2008




Download File - 11.7 MB
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MEMS Flexures: Non-linear Limits, Shear and Axial Effect

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Feb 15, 2008




Download File - 11.6 MB
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MEMS Flexures: Electrostatic Actuation, Derivation

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Feb 20, 2008




Download File - 11.4 MB
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MEMS Materials: Mechanical Properties of Materials, MEMS Material Deposition Process

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Feb 22, 2008




Download File - 7.2 MB
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MEMS Materials: Failure of Materials, MEMS Materials Test

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Feb 25, 2008




Download File - 10.6 MB
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MEMS Anchors: Background, Fabrication, Finite Element Model

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Feb 27, 2008




Download File - 11.3 MB
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Distributed Parameter Oscillator: Rayleigh's Principle, Rayleigh's Energy Method

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Feb 29, 2008




Download File - 10.8 MB
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MEMS Angular Accelerometer: Design Concept, Analysis

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Mar 03, 2008




Download File - 10.6 MB
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MEMS Optimization: design, Optimization Paradigm, Examples

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Mar 05, 2008




Download File - 10.5 MB
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MEMS Optimization: Monotonicity Analysis

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Mar 07, 2008




Download File - 12.0 MB
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MEMS Optimization: Monotonicity Analysis - con't

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Mar 10, 2008




Download File - 11.3 MB
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MEMS Optimization: Monotonicity Analysis - con't

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Mar 12, 2008




Download File - 10.8 MB
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MEMS Optimization: Penalty Function Method

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Mar 17, 2008
0:00:00 +0800,




Download File - 12.1 MB
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MEMS Optimization: Unconstrained Optimization, Method of Steepest Descent

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Mar 19, 2008




Download File - 10.4 MB
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MEMS Optimization: Quadratic Approximation, Conjugate Directional Method

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Mar 31, 2008




Download File - 10.5 MB
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MEMS Optimization: Lagrange Multiplier Method

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Apr 02, 2008




Download File - 11.7 MB
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MEMS Pivots: Stress Analysis

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Apr 04, 2008




Download File - 10.9 MB
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MEMS Pivots: Stress Evaluation, Design Approach

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Apr 07, 2008




Download File - 10.2 MB
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MEMS Fluidics: Overview

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Apr 09, 2008




Download File - 11.2 MB
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MEMS Fluidics: Micro Mixers

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Apr 11, 2008




Download File - 11.9 MB
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MEMS Fluidics: Micro Valves and Pumps

webcast@media.berkeley.edu Author: Albert Pisano
Wed, Apr 16, 2008




Download File - 10.7 MB
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MEMS Flow: Newtonian Fluids, Couette Flow, Viscous Damping of Resonators

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Apr 18, 2008




Download File - 10.9 MB
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MEMS Flow: Stokes Solution, Effect of Reynolds Number

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Apr 21, 2008




Download File - 9.4 MB
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MEMS Flow: Surface Energy, Bubble Actuators, Bubble Valve

webcast@media.berkeley.edu Author: Albert Pisano
Fri, Apr 25, 2008




Download File - 10.5 MB
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MEMS Visualization: Methods and Results

webcast@media.berkeley.edu Author: Albert Pisano
Mon, Apr 28, 2008




Download File - 11.0 MB
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MEMS Inertial Instument: Rotary Internal Combustion Engine (Lecture is only 22 minutes)

webcast@media.berkeley.edu Author: Albert Pisano
Fri, May 02, 2008




Download File - 5.0 MB
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MEMS Inertial Instument: Angular Rate Sensing

webcast@media.berkeley.edu Author: Albert Pisano
Mon, May 05, 2008




Download File - 11.2 MB
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MEMS Inertial Instument: Review of Gyroscopes

webcast@media.berkeley.edu Author: Albert Pisano
Wed, May 07, 2008




Download File - 10.9 MB
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MEMS Inertial Instuments: ADXL50

webcast@media.berkeley.edu Author: Albert Pisano
Fri, May 09, 2008




Download File - 7.6 MB
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MEMS Research: Programs at DARPA

webcast@media.berkeley.edu Author: Albert Pisano
Mon, May 12, 2008




Download File - 10.8 MB
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 Technology  Computers

 

This Author: Albert Pisano
This Publisher: webcast.berkeley
 
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