Microelectromechanical Systems
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webcast.berkeley Course - EE 246
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This course is aimed to provide basic understanding of integrated circuit (IC) processes and microelectromechanical system (MEMS). Technologies including analyses, design, and manufacturing processes of MEMS will be introduced. The first part of the course emphasizes IC processes including thin film deposition, lithography, and etching. The second part of the course deals with micromachining processes including surface-, bulk-micromachining, LIGA and other processes.
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- LearnOutLoud.com Product ID:
M025841
Technology
Computers
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